蔡坤諭 Kuen-Yu Tsai

Associate Professor, Department of Electrical Engineering, National Taiwan University

Major Research Areas:

Nanolithography/nanopatterning process, equipment, and software technologies; Nanoscale integrated-circuit design for manufacturability and invariability; Nanoscale detection and control systems; High-precision optomechatronics; Multiobjective-robust-optimal control; System identification; Convex optimization and its engineering applications

Research Summary:

Dr. Tsai's main research theme is the design and application of advanced control, simulation, signal processing, optimization, and machine learning techniques to solve nanolithography and general nanotechnology related problems, with a current focus on the design and fabrication techniques of exploratory nanoscale integrated circuits at the IRDS 10 nm half-pitch node (aka "2 nm node") and beyond. More recently he has increased aerospace-related research activities. He has also conducted research on control system design automation, automotive and aerospace electronics,  consumer electronics, and biomedical equipment design. His research group at the Nanoscale Design and Fabrication Systems Lab (NDFSL), Particle Beam Precision Patterning and Imaging Lab (PBPPIL), and High-Performance Servo Systems Lab (HPSSL) has been studying topics including, e.g.,

(1) Nanolithography processes and equipment: Next-generation lithography (NGL) based on multiple-charged-particle-beam-direct-write (MCPBDW), extreme ultraviolet (EUV) light, and directed self-assembly (DSA); Ion beam imaging and patterning. (2) Nanolithography software: Lithography/etching simulation, model calibration, and resolution enhancement techniques (RETs); Design for manufacturability (DFM); Charged-particle optics design optimization. (3) Nanolithography process and equipment control: Advanced process control (APC), advanced equipment control (AEC), and fault detection/classification (FDC); High-accuracy alignment and overlay algorithms; Optimal lens adjustment. (4) Circuit design automation by control and optimization techniques: Optimal design of sensor/actuator/power/computation circuits with control system perspectives. Automatic circuit/layout generation and optimization. Design for radiation hardening. (5) Sensor/actuator array systems, signal processing, and real-time control: Electron-beam position monitor system based on MEMS and sensor fusion technologies. Mixed-signal circuit design for laser interferometers. High-performance motion systems, e.g. micro laser scanning mirrors. Laser speckle reduction. ADAS sensor analysis and robustness evaluation. (6) Automotive and aerospace electronic systems: Permanent magnet synchronous motor control system analysis and design for mild hybrid vehicles. Active/semi-active suspension systems. (7) Design and control of UAV systems: Optimal design and control of electrical VTOL (eVTOL) aircraft. Control and optimization in advanced air mobility (AAM) systems.

Dr. Tsai is open to establishing new research topics based on student interests and industry demands.

NTU EE Research Divisions Automatic Control, Electronic Design Automation

Teaching Control Systems (2019 Spr.), Digital Control Systems (2020 Spr.), System Identification (2020 Aut.), Nonlinear/Convex Optimization (2019 Aut.), VLSI Design for Manufacturability

Talks

 "Introduction to Lithography for Nanometer VLSI Manufacturing" (2006/12/21 at NTHU CS dept. and 2007/03/09 at EDA Forum in Taiwan)

"NGL Research Activities at NTU" (2006/12/12 EVU Workshop at NSRRC, Taiwan)

"From Control to Nanofabrication -- A System Engineer's Vision" (2004/03/24 at NTU EE dept.)

Favorite Quotes

"There's plenty of room at the bottom." – Richard P. Feynman

"No exponential is forever: but "Forever" can be delayed!" – Gordon E. Moore

"The road to hell is paved with good intentions."

Article Links

How William Shockley's Robot Dream Helped Launch Silicon Valley, IEEE Spectrum, 2013

Trailblazers in Solid-State Electronics, IEEE Industrial Electronics Magazine, IEEE 5(4), pp. 46-47, 2011

Group Staff

Ms. Yi-Ru Chen, Adminstrative Research Assistant. diochen@ntu.edu.tw +886-2-33669638

Mr. Jia-Syun Cai, Technology Research Specialist. d11943003@ntu.edu.tw +886-2-33663704

Funding info. for prospective graduate students Full-time graduate students are adequately supported regardless of research topic(s) chosen.

Positions One Postdoctoral Researcher position is currently open.